High vacuum -
3.0 nm at 30 kV (SE) -
4.0 nm at 30 kV (BSE)* -
8.0 nm at 3 kV (SE) High vacuum with beam deceleration option 7.0 nm at 3 kV(BD mode* + vCD*) Low vacuum -
3.0 nm at 30 kV (SE) -
4.0 nm at 30k V (BSE)* -
10 nm at 3 kV (SE) Extended vacuum mode (ESEM) 3.0 nm at 30 kV (SE) *optional |